Projects

Elena comprises 15 Early Stage Researchers, which all pursue individual PhD projects;

ESR1; Low energy electron induced dissociation of potential gold containing FEBID precursor molecules [link to PI]

ESR2; Low energy electron induced dissociation of model compounds for EUVL resist [link to PI]

ESR3; Fundamentals of a novel chemically assisted FEBID and EUV lithography [link to PI]

ESR4; Study of electron induced dissociation of model compounds for FEBID and EUVL using Velocity Map Imaging [link to PI]

ESR5; Inorganic-organic hybrid resists containing well-defined transition metal-oxo clusters [link to PI]

ESR6; Exploring fundamental physical and chemical aspects of focused electron beam induced deposition (FEBID) under well-defined conditions [link to PI]

ESR7; Synthesis and characterization of potential gold containing FEBID precursor complexes [link to PI]

ESR8; Chemical activation and cross-linking of molecular monolayers by low energy electrons and EUV photons, and new FEBID precursors in commercial processing [link to PI]

ESR9; Controlled nano-patterning using Focused Electron Beam Induced Deposition (FEBID) [link to PI]

ESR10; Metal nanowires by FEBID with novel precursors [link to PI]

ESR11; Chemical reactions induced by EUV photons [link to PI]

ESR12; New material chemistry exploration for Extreme Ultraviolet Lithography [link to PI]

ESR13; Selection of novel FEBID precursors with structural and compositional analysis of nanostructures [link to PI]

ESR14; Modelling of the FEBID process and FEBIP based fabrication of nanodevices [link to PI]

ESR15; Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID) [link to PI]