Participants

Beneficiaries

The University of Iceland is ELENA's Coordinating Institute and employing three ESR's. Two of these work in the field of experimental physical chemistry studying low energy interaction with precursor molecules for focused electron beam induced deposition and with model compounds for extreme ultraviolet resist material. These studies are conducted at the electron interaction lab the University of Iceland under the supervision of Prof. Oddur Ingólfsson, the coordinator of ELENA. The third ESR is working in the field of theoretical chemistry involving the use and further development of state-of-the-art simulation tools for long time scale simulations and electronic structure calculations. This work is conducted within the theoretical chemistry group at the University of Iceland under the supervision of Prof. Hannes Jónsson.

The University of Iceland is a leading Icelandic university and an active participant in the international scientific and academic community. The University’s success in recent years has earned it a place amongst the very best universities according to recognised international rankings. At the University of Iceland great emphasis is placed on strengthening research and educating young people, preparing them for taking an active part in society as well as making their mark on the global community. Currently some 14,000 students are enrolled at the University, including over 1,100 international students. 

The faculty of physical sciences is one of 25 faculties within the five schools at the University of Iceland. It engages roughly 45 well-educated and well-trained academics, who for many years have been committed to teaching, training and research at high standards. An important part of the faculty’s operations is service teaching for other UI faculties. The faculty has it research research facilities at the Science Institute of the University of Iceland, an independent research institute embracing research in the field of chemistry, physics, mathematics and geology.

The ARCNL nanophotochemistry group will contribute to ELENA with synthesis of materials for EUV lithography and with fundamental studies of photoreactivity at the industrially relevant EUV wavelength of 13.5 nm. A unique set-up will be constructed for time-resolved spectroscopy using pulsed EUV excitation of thin films. 

The University of Bremen employs one ESR who works in the field of experimental physical chemistry studying surface processes induced by low energy electron interactions with precursor molecules for focused electron beam induced deposition and with model compounds for extreme ultraviolet resists. These studies are conducted at the Institute for Applied and Physical Chemistry (http://www.iapc.uni-bremen.de/swiderek/) of the University of Bremen under the supervision of Prof. Petra Swiderek. The lab focuses on the fundamental chemistry that underlies the diverse phenomena and processes that are induced by electron-molecule collisions. In particular, current projects cover areas ranging from electron-controlled chemical synthesis, surface modification and the chemistry underlying state-of-the-art nanofabrication all the way to astrochemistry.

The University of Bremen is one of Germany’s eleven top universities of excellence, renowned for its strengths in sciences and engineering, humanities and social sciences. It collaborates closely with numerous independent research institutes, both on campus and around the region. Their competence and vitality have attracted more than 400 research and business ventures to the technology park around campus, creating a nationally recognized hub of high technology. Roughly 23,000 people are currently active as students, teachers, researchers, or employees of the University.

The Faculty Biology/Chemistry (FB2) is one of 12 faculties at the University of Bremen. Its research focuses on both fundamentalas well as applied research in the areas of Biology and Chemistry and contributes to the MAPEX Center for Materials and Processes (http://www.uni-bremen.de/en/mapex.html) of the University of Bremen. All study programs are research oriented and specialize in developing the key competences students require for future university and non-university careers.

Dr. Petra Swiderek is a professor for Physical Chemistry at the Faculty Biology/Chemistry (FB2) of the University of Bremen. She is involved in various international research collaborations and is currently the coordinator of the COST Action CELINA (CM1301) and an active member of the Marie Skłodowska-CurieInnovative Training Network ELENA. Dr. Swiderek received her PhD from the faculty of natural sciences at the University of Cologne in 1991. After holding a post doctoral position in Radiation Research at the Medical Faculty of the University of Sherbrookein Canada, she established an independent group in Cologne. Since 2003 she is full professor of Physical Chemistry at the University of Bremen and visiting professor at the University of Sherbrooke.

The Open University (OU); The OU is a world leader in modern distance learning and has educated more than 1.94 million people worldwide since its launch in 1969. The OU is a pioneer of teaching and learning methods that enable people to achieve their career and life goals studying flexibly at times and places that suit them. It is one of the largest Universities in Europe with circa 174,000 students. 

The OU has an active research programme, winning around €32 million of research income annually. It enjoys an international reputation for the quality of its research in many fields. OU research is addressing global challenges. OU researchers explore global climate change, security, use big data sets to create models to raise alerts about potential outbreaks of epidemics and explore the origins of water in and on the moon. The Open University has extensive collaborations with governments, (companies (such as the space technology company e2v, NASA and the European Space Agency), the National Health Service (such as our work pioneering new methods in pharmacoepidemiology), conservation agencies (such as protecting the natural diversity of floodplain meadows and the world’s forests), banks (to reduce risk in financial decision-making) and international agencies and social movements on expanding civil, political and social rights.

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The Friedrich-Alexander-Universität (FAU) Erlangen-Nürnberg is leading the work package „Nano-scale fabrication with FEBIP and EUVL“ within ELENA and employs one ESR. The ESR will be part of the “Microscopy and Nanolithography” group and will have the opportunity to working with an unique ultra-high vacuum setup, which houses a scanning electron microscope (SEM) with an electron-beam spot with a diameter < 3nm. This instrument will be used to perform, investigate and explore novel electron beam based nanolithographic methods. The ESR will be supervised by Dr. Hubertus Marbach.

The FAU Erlangen-Nürnberg is a strong research university with an international perspective and one of the largest universities in Germany, with 40,174 students, 256 degree programmes, 4,000 academic staff (including over 647 professors), 180 million euros (2015) third-party funding, and 500 partnerships with universities all over the world. FAU’s outstanding research and teaching is reflected in top positions in both national and international rankings, as well as the high amount of DFG funding which its researchers are able to secure.

The Department of Chemistry and Pharmacy has a long standing tradition of excellence – because of the vast resources, cutting-edge facilities, and outstanding faculty – and is ranked among the best in the country. This is documented by the quality of its programs, the caliber of its faculty, and the excellence of its students. The faculty and staff of the Department of Chemistry and Pharmacy provide an environment, where students at all levels explore, discover, and learn chemistry through coursework and research. In fact, undergraduate, graduate, and post-graduate students/research associates join the Department of Chemistry and Pharmacy from across the country and from countries all over the world to study in specific research programs directed by the University of Erlangen-Nürnberg’s chemistry professors. The Department employs 28 professors pursuing research in all areas of chemistry and pharmacy.

Dr. Hubertus Marbach is the founder and leader of the working group “Microscopy and Nanolithography” at the Department of Chemistry and Pharmacy. He has been involved in various national and international research projects and is currently an active member of the FAU cluster of excellence “Engineering of Advanced Materials” (EAM), the DFG research unit FOR 1878 “funCOS”, the Erlanger “Graduate School Molecular Science” (GSMS), the COST Action CELINA (CM1301) and the academic/industrial Marie Skłodowska-Curie, Innovative Training Network; ELENA. In 2002 Dr. Marbach received his PhD with highest praise from the University of Hannover in the field of physical chemistry. From 2002-2004 he joined the “Surface Science Center” with John T. Yates, Jr. at the University of Pittsburgh, PA/USA before he moved to Erlangen. Dr. Marbach supervised 14 PhD students and his scientific activities are documented in 73 publications in refereed journals, more than 350 conference contributions as presenter or co-author and more than 50 invited lectures at international conferences and scientific institutions.

The University of Oslo employs one ESR in ELENA. This ESR works with the synthesis and chemical and physical characterization of potential organometallic precursors for focused electron beam induced deposition. Particular attention is on precursors that contain gold. The preparative and characterization work is conducted in thelaboratories of the Section for Catalysis at the Department of Chemistry under the supervision of Prof. Mats Tilset. He is a long-time expert in organometallic chemistry.

The University of Oslo is the largest Norwegian university, and hosts the largest chemistry department in Norway. The university, the department, and the sectionactively participate in the international scientific and academic communities. Currently about 28,000 students are enrolled at the University of Oslo, including 4,300 international students. 

The Department of Chemistry has about 35 permanent academic staff, all of whom are involved in research as well in teaching and training of students (BSc, MSc, PhD programs) and postdocs. The Section for Catalysis is also a partner in the Centre for Materials Science and Nanotechnology (SMN) at the Faculty of Mathematics and Natural Sciences. This partnership ensures access to state-of-the-art technologies and instrumentation for characterization and investigation of materials and compounds that will be of relevance to ELENA research. The Section for Catalysis has ca. 50 members (students and employees), of which about 60-70% are from abroad. The five professors in the Section for Catalysis conduct catalysis research in a broad sense, ranging from molecular chemistry (organic chemistry, organometallic chemistry, homogeneous catalysis) to solid-state catalysis and materials science (zeotype materials, metal-organic frameworks, supported catalysts). In all areas, the research includes synthesis, characterization, mechanistic studies, and computational studies.

Prof. Mats Tilset, Ph.D., is a professor of chemistry in the Section for Catalysis at the Department of Chemistry. He teaches the introductory organic chemistry course and an advanced course in organometallic chemistry. He has been involved in various international research initiatives and currently participates in the COST ActionsCELINA (CM1301), CHARISMA (CM1205), and CHAOS (CA15106). From 2016 he is a participant in the academic/industrial Marie Skłodowska-Curie Innovative Training Network, ELENA. Prof. Tilset received his Ph.D. degree from the Department ofChemistry at the University of California, Berkeley, in 1985. He worked as a postdoctoral fellow at the Norwegian Institute of Technology, Trondheim, Norway,for three years before moving to his current affiliation at the University of Oslo in 1989. Here, he has been a full professor since 1993.

Bielefeld University employs one ESR's in the field of experimental physics studying investigation of chemical reactions occurring during the exposure of surface bound molecular monolayers to electron and EUV radiation. We search for precursor molecules that form intermolecular links to their neighbours, so that a mechanical stable 2D carbon nanomembrane (CNM) is fabricated. The study is conducted at the chair for physics of supramolecular systems and surfaces under the supervision of Prof. Armin Gölzhäuser and Dr. Sascha Koch. 

Bielefeld University was founded in 1969 with an explicit research assignment and a mission to provide high-quality research-oriented teaching. Today it encompasses 13 faculties covering a broad spectrum of disciplines in the humanities, natural sciences, social sciences, and technology. With about 24,000 students in 115 degree courses and about 2,750 staff members (including 269 professors and lecturers as well as 1,390 academic staff) it is one of Germany's medium-sized universities. In relevant and focused areas covering the humanities and social sciences along with the natural and engineering sciences, Bielefeld University is one of the top research universities in Germany. 

The Chair for Physics of Supramolecular Systems and Surfaces focuses on the research of 2D materials and compounds as for instance nanomembranes and graphene or graphene-like systems. The Bielefeld group pioneered the production of 1 nm thin, mechanically stable Carbon Nanomembranes (CNMs) and graphene from molecular monolayers. The research of the group is focused on the fabrication of CNMs: monolayer formation, radiation induced cross-linking, and physical and chemical modification of CNMs. The group has developed and patented efficient protocols to produce customized CNMs and to transfer these thin sheets onto arbitrary locations. This opened horizons for the applicability of freestanding 2D nanostructures and to move them from one surface to another at will. For this purpose Bielefeld University operates advanced surface analytical techniques, including X-Ray and UV Photoelectron Spectroscopy (XPS, UPS), Low Energy Electron Diffraction (LEED), Scanning Tunneling Microscopy (STM), Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM), Infrared (IR) spectroscopy, as well as the first Helium Ion Microscope (HIM) at a German university. This will allow the controlled tailoring of novel CNMs for basic research as well as technical application. 

Prof. Dr. Armin Gölzhäuser received his Ph.D. from Heidelberg University in 1993. From 1993-1996 he was a Feodor Lynen Fellow at the University of Illinois. In 2001, he received his habilitation (Heidelberg) and in 2003 he became a professor of physical chemistry at Marburg University. In the same year, he became a professor of experimental physics at Bielefeld University. Armin Gölzhäuser's research is focused on the fabrication, characterization and application of low dimensional nanostructures and functional materials. His laboratory operates modern analytical tools: electron microscopes, photoelectron spectrometers, scanning probes and a helium ion microscope (HIM). He has a strong interest in the technological application of nanostructures and in 2011, he founded CNM Technologies, a start-up company dealing with applications of carbon nanomembranes.  He is a founder of the Bielefeld Institute for Biophysics and Nanoscience (BINAS), and he is an associate editor of the Beilstein Journal of Nanotechnology.

 

 

Dr. Sascha Koch wrote his diploma thesis about Scanning Tunneling Microscopy of organic molecules ans SAMs in the group of Prof. Dr. Rolf Möller at the University of Duisburg-Essen and obtained his diploma in physics in 2007. From 2008 to 2011 he was PhD student in the group of Prof. Dr. Ernst Meyer at the University of Basel, investigating the super structures of graphene and hexagonal boron nitride formed on transient metals by means of  Atomic Force Microscopy (AFM) and Kelvin Probe Force Microscopy (KPFM). After further 8 month as a Post-Doc in Basel, he worked 3 years for Endress+Hauser GmbH+Co.KG in Maulburg (Germany) as a Technology Specialist in the section of ceramic pressure sensors for i.a. medical applications. Since November 2015 he continues his scientific work in the group of Prof. Dr. Armin Gölzhäuser in the field of 2D materials and Nanomembranes. 

Controlled nano-patterning using Focused Electron Beam Induced Deposition (FEBID).

Delft University of Technology, Dept. Imaging Physics, Charged Particle Optics group (CPO), Lorentzweg 1, 2628CJ Delft, The Netherlands.

The project aims at the development of instrumentation and methods to use FEBID for the fabrication of nano-structures and nano-devices. Key issues are i) control over size and shape of deposits and ii) reproducibility. FEBID is a technique that involves multiple parameters, such as the electron flux, electron energy, electron exit area of scattered electrons, energy distribution of surface electrons, substrate material, substrate temperature, substrate surface properties, the precursor gas flux, precursor surface diffusion, adsorption/desorption of precursor molecules, electron stimulated desorption, electron induced dissociation cross section, electron beam induced heating, and background pressure (residual gases). To develop the technique into a reliable lithography tool for nano-prototyping, or even for complementary lithography in the semiconductor industry, requires a thorough characterization of all parameters. The CPO group at TU-Delft will focus on these key issues. Parameter studies will be done in combination with reproducibility experiments to gain understanding of, and to achieve control over, process parameters. Experimental tests with novel precursors, developed by other partners in the network, will be performed. The metrology of nano-structures will receive much attention, as the precise determination of nanometer-sized patterns is far from trivial. To this end electron microscopy imaging will be combined with in-situ AFM imaging.

The ESR on the project at TU-Delft will be trained in electron beam instrumentation, electron beam lithography, and electron-induced dissociation of molecules. Two secondments are planned: one at Phenom-World, where the focus will be on implementation of FEBID in their table-top SEM’s (the development of such low-cost nano-prototyping tools would guarantee a widespread use of the FEBID technology), and one at IMEC to study the feasibility of using FEBID as a lithography technique complementary to resist-based lithography.

Empa, the Swiss Laboratories for Materials Science and Technology is bringing long-standing FEBID expertise into ELENA's training network and employing one ESR. The ESR will work on enlarging the portfolio of FEBID precursors by developing novel temperature-controlled gas injection hardware and FEBID protocols to enable deposition of electrically tunable metal nanowires with novel low vapour pressure FEBID precursors. These studies are conducted at the laboratory for mechanics of materials and nanostructures at Empa in Thun, Switzerland, under the supervision of Dr. Ivo Utke.

Empa is an interdisciplinary research institute of the ETH Domain and conducts cutting-edge materials and technology research. Empa’s research and development activities focus on meeting the requirements of industry and the needs of society, and thus link applications-oriented research to the practical implementation of new ideas in the areas of nanostructured, “smart” materials and surfaces, environmental, energy and sustainable building technologies as well as biotechnology and medical technology. Empa’s mission is to kick-start innovation: we are capable of providing our partners with customized solutions that not only enhance their innovative edge and competitiveness for global markets, but also help to improve the quality of life for the public at large. Through an efficient technology transfer Empa is turning research results into marketable innovations. In a survey of 112 leading European R&D managers, Empa is within the TOP10 highly reputed R&D organizations (together with Fraunhofer, Max Planck, IBM, Siemens, and Philips). Empa employs a staff of about 1'000 of which 27% are female. More than 500 are engineers and scientists with advanced university degrees, 29 are professors, ≈100 are postdocs, ≈200 are PhD students, ≈200 are Bachelor and Master students. Empa consists of five departments with 29 research labs and eight support divisions and organizes its research activities in  five  Research  Focus  Areas,  which  encourage  networked  thinking  and  inter-  and  transdisciplinary  cooperation.  About 280 employees are presently engaged in 37 EMPA spin-offs and start-ups. EMPA is  continuing  to  disseminate  the  innovations  to  a  broad  public  via  its  social  media  channels,  news  and  video  portals (http://www.empa.ch/web/empa/newsandmedia). 

The Laboratory for Mechanics of Materials and Nanostructures is one of the 29divisions of Empa. Within four groups headed each by senior scientist the lab performs cutting edge research in the fields of FEBID and thin films, mechanics, electrodeposition, and microanalysis to develop novel processes for novel model materials within a team of about 30 people (http://www.empa.ch/web/empa/mechanics-of-materials-nanostructures).

Dr. Ivo Utke is a permanent scientist at Empa and heading the group of low dimensional materials. He has hosted international summer schools and workshops on FEBIP, nanomanipulation, and SEM analysis, and runs a doctoral school together with Prof P Hoffmann on FEBIP and FIBIP at the Ecole Polytechnique Federale de Lausanne(EPFL). He has been actively involved in various international research projects and is member of the Celina COST Action CM1301. Dr. Ivo Utke received his PhD from thefaculty of Natural Sciences of the Humboldt University in Berlin in 1995 before working as a post-doctoral researcher at EPFL in Lausanne, Switzerland. He took his position as a scientist at Empa in 2004.

Imec is the world-leading research institute in nanoelectronics and digital technologies. The combination of our widely acclaimed leadership in microchip technology and profound software and ICT expertise is what makes us unique. As a trusted partner for companies, start-ups and universities we bring together close to 3,500 brilliant minds from over 70 nationalities and a world-class infrastructure, including 2 state-of-the-art cleanrooms. Therefore, imec offers a stimulating environment to perform PhD research. In ELENA, we will recruit an Early Stage Researcher (ESR) to work on fundamental understanding of the mechanisms of interaction behind the photoresist chemistry induced through EUV radiation and the boundary lithographic process conditions. In addition we will offer secondments two ESR from the network. The first will be trained to become acquainted with the high-volume semiconductor lithography field and the second on state-of-the-art EUV lithography close to the level of industrial application.

TESCAN Ltd. is a leading global supplier of scanning electron microscopes and related charged-particle beam instruments, accessories and solutions for nanotechnological analyses. The reputation and brand name of TESCAN has been built on designing and manufacturing scanning electron microscopes and complex, multi-modal system solutions for a wide variety of applications from semiconductors to biological imaging to mining. The headquarters is located in Brno, Czech Republic. Subsidiaries spanning four continents ensure the worldwide reach of expertise that is developed in Brno. Under the label “Excellence in scientific instrumentation”, our customers can find unique solutions with a wide range of analytical capabilities. The TESCAN sales and service network covers countries all over the world and almost 2000 SEM installations in more than 77 countries attest to the technological excellence of TESCAN products.

TESCAN staff is experienced in handling all aspects of coordinated research and training projects. Laboratories and clean rooms provide more than 15 electron microscopes, focused ion beam workstations and other laboratory equipment. In 2013, TESCAN R&D shifted to a newly constructed building housing R&D Application and Demo labs with a total area of more than 320 m2.

As part of the ELENA consortium, TESCAN will host and train an Early-stage researcher in the selection of novel precursors for building 3D-nanostructures as well as in their structural and compositional analyses.

 

The research and training will be supervised by Dr. Jaroslav Jiruše, head of R&D Physics. Jaroslav graduated from the Brno University of Technology in 1996. His PhD study at the same university included two research fellowships in Aarhus University, Denmark. He successfully defended his thesis on low-energy electron diffraction, and joined TESCAN in 2005. He has been responsible for the key developments in TESCAN and is the author of patents for detectors and columns for scanning electron microscopes. Jaroslav successfully served as the coordinator of the EU Framework 7 project UnivSEM(2012-2015).

 

The organizational aspects of the project will be handled by Dr. Nagavalli S. Kiran, Project manager R&D, who will be responsible for the management of specific activities as well as the dissemination and communication among project partners. Kiran joined TESCAN in 2015, following a two-year stint in a Czech biotechnology start-up. He obtained his Bachelors and Master degrees in India and defended his PhD thesis form Masaryk University in Brno in 2006. In TESCAN, Kiran is responsible for the administrative and management aspects of R&D projects at both national and European levels. He has been successfully building bridges between the scientific and administrative sections of the R&D teams.

ZEISS is an internationally leading technology enterprise operating in the optics and optoelectronics industries. ZEISS develops and distributes lithography optics, measuring technology, microscopes, medical technology, eyeglass lenses, camera and cine lenses, binoculars and planetarium technology. With its solutions, the company constantly advances the world of optics and helps shape technological progress. 

 

Semiconductor Manufacturing Technology

With a broad portfolio of products and globally leading know how in the areas of lithography and optical modules, the Business Group Semiconductor Manufacturing Technology (SMT) covers key processes in microchip production. Its strategic business unit Semiconductor Metrology Systems (SMS) focuses on a key component in Semiconductor Manufacturing, the photomask. Core expertise in light and electron optics, complemented by a pioneering femtosecond laser technology form the foundation of a product portfolio comprising in-die metrology, actinic qualification, repair, and tuning of photomasks.

Further information at www.zeiss.com/smt

Partners

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CEI-Europe AB, Continuing Education Institute-Europe AB is a Swedish based company dedicated to Learning for Professionals within the fields of Semiconductor Technology, Thin Film Deposition, System Design, HW Design, and Telecommunications. We will contribute to the ELENA project by providing expertise in organisation of three training events for the ESRs. The events will enable sharing of knowledge between participating parties as well as contribute to networking amongthe ESRs and other participants of ELENA.

The CEI-Europe office handles all aspects of course development, planning, marketing, customer contact, and delivery of short courses across Europe and to customers in other parts of the industrialized world. We ensure high standards in organisation are met in all aspects of the course delivery together with our partner venues. The cities and resort venues for CEI-Europe's courses are specially selected for easy access to activities that encourage professional networking outside the classroom.
CEI-Europe has 40 short courses for professional engineers and scientist, 3-5 days long, with detailed technical depth both theoretically and with hands-on experience. The CEI-Europe instructors are internationally recognized in their respective fields and have proven pedagogic ability to impart technological expertise to a professional audience. Numerous patents, technical articles, books and awards are linked to the work of our instructors.

MScEE Elisabet Larsson is CEO and co-owner of CEI-Europe AB. She received her M.Sc. Degree in Electrical Engineering from Linköping University of Technology, Sweden, in 1992. Before joining CEI-Europe in 2002, she was employed as validation engineer and SW coordinator at ICL Ltd. and Fujitsu, and later as project manager at Ericsson AB in Sweden. She has served as CTO 2002-2009 and since 2009 as CEO of CEI-Europe. 

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The Institute for Molecular Sciences of Orsay (ISMO) is a joint laboratory of the “Centre National pour la Recherche Scientifique” and the Université Paris-Sud, both involved in the recent creation of the Université Paris-Saclay, a new University in the southern part of the Ile-de-France. The « electrons-solids » team belongs to the research group “Surfaces, Interfaces: Reactivity and Nanostructuration” (SIREN) and welcomes two associate professors (Dr. Lionel Amiaud, Dr. Céline Dablemont) and a full professor (Dr. Anne Lafosse). The group is working on low-energy electron chemistry induced within supported molecular films (self-assembled monolayers, ices, polymers films). 

As a research university with a huge disciplinary spectrum, Paris-Sud is particularly recognized for the high level of its basic research, most notably in mathematics and physics. In Health Sciences, its research has had rich and fruitful results in therapeutic innovation in a large number of medical fields. Its Law, Economics and Management teams carry out highly original research in new technologies and innovation. All this research activity takes place in laboratories, which are shared with major research organizations including CNRS, Inserm and CEA, whose involvement has considerably enhanced the international reputation of the research facilities. Key figures: 28000 students, 1900 teaching staff, 1200 research scientists, 2200 engineers, technicians, administrative staff and maintenance staff. The Faculty of Science welcomes over 13000 students and 2100 PhD students, and has a staff of 1700 professors and researchers and 1800 administrative and technical workers. Education and research programs cover the fields of biology, chemistry, electronics, computer sciences, mechanics, mathematics, physics, earth sciences and physical education.

The Comenius University (CU) is a partner organization involved in ELENA. It has, during its 96 years of existence (1919-2015), established itself as the largest and most productive research higher education organization in Slovakia. Research and synergistic enterprise is one of the primary strategic objectives of the CU. Through its research groups, the university provides extensive training to over 6,000 Masters and 700 PGs per year providing Slovakia with a highly skilled workforce to support its industrial base. CU staff are active across many disparate fields of research and active participants in several national and international R&D projects including leading Slovakian engagement with the International Fusion programme. 

The Electron and Plasma Physics Laboratory; The Electron and Plasma Physics Laboratory - EPPL at FMPI CU is amongst the top research teams at the CU and has one of youngest staff profiles.  In the last two decades its research has resulted in the publication of more than 100 scientific papers in renowned scientific journals and resulted in more than 1000 citations (according Web of Science) some of the highest publication outputs and citation rates in Slovakia. EPPL has participated in several trans-EU research programmes, particularly through COST Actions, indeed the EPPL has organised several international workshops within COST actions as well as several international conferences. 

In the last two decades EPPL has, in part, built its reputation on its high level of expertise in the field of development and innovation of new experimental and theoretical techniques and methods. In particular, EPPL has developed several unique experimental facilities for study of ionising electron interaction studies - a Crossed Electron Molecular Beams Ion Apparatus – (CEMBIA) for gas phase studies. The Electron Induced Fluorescence Apparatus – EIFA, developed for electron induced fluorescence studies and dissociative excitation studies to molecules in the UV/VIS and VUV spectral ranges. For electron swarm experiments an ‘Electron and Ion Mobility Spectrometer’ has been built to perform electron swarm experiments and which combined with -orthogonal acceleration time of flight spectrometry (IMS-oaTOF) has been developed to study low energy electron- and ion-molecule reactions at atmospheric pressures (one of the few instruments in the world capable of such studies). Furthermore, EPPL has installed an Electron Cluster Beam Apparatus - (ILLN) for cluster phase studies, developed at Free University Berlin and transferred and upgraded recently at Comenius University.  EPPL’s experimental research is complemented and supported by the high level quantum chemical calculations which are necessary in order to interpret the experimental spectra and to determine important parameters of electron and ion induced reactions which can subsequently be used in technological models. 

Besides the fundamental research focused on electron interactions, the laboratory is active in several areas of applied research related to electron and ion processes, mainly in the field of microdischarges and atmospheric plasma sources for bio-medical and technological applications.

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The University of Florida is a partner institution in ELENA and a site for secondments for students. Visiting students work on design and synthesis of new precursorsspecifically tailored for focused electron beam induced deposition. These studies are conducted in the Department of Chemistry under the supervision of Prof. Lisa McElwee-White. 

The University of Florida is among the most academically diverse public universitiesin the United States, with 16 colleges and more than 200 research centers and institutes.  The University has a strong tradition of attracting and providing research opportunities for top graduate and undergraduate students and is consistently ranked among the nation’s top universities. With over 5000 faculty/researchers and more than 50,000 students, UF is a research rich environment.  It is one of only 17 universities in the country to share land-grant, sea-grant, and space-grant status.  Faculty members at UF are committed to research and teaching at all levels; duringthe 2016 fiscal year, UF reported a total of $724 million in total sponsored research funding. 

The Department of Chemistry is one of the 21 departments in UF's College of Liberal Arts and Sciences. It consists of 40 research active tenure track faculty along with 12 instructors and lecturers. Research is supported by 5 staff scientists who manage the spectroscopic facilities.  Each semester, more than 8000 students are taught in chemistry classes, many of which are service courses. The roughly 300 Ph.D. students in Chemistry are an integral part of the research and teaching missions of the department.

Prof. Lisa McElwee-White is the Colonel Allen R. and Margaret G. Crow Professor of Chemistry at the University of Florida.  She received a B.S. degree from the University of Kansas and completed her Ph.D. at the California Institute of Technology.  After two years of postdoctoral work at Stanford University, she joined the Stanford faculty as an Assistant Professor in 1985.  She moved to the University of Florida as an Associate Professor in 1993 and was promoted to Professor in 1997.  Following a term as Associate Dean for Administrative Affairs in the College of Liberal Arts and Sciences, she returned to full time research and teaching.  She serves as director of the UF Beckman Scholars Program and recently served as the Director of the NSF-CCI Center for Nanostructured Electronic Materials.  Prof. McElwee-White's research interests center around the applications of organometallic chemistry in materials science and catalysis.  Her work has been funded by a variety of federal agencies, foundations, and companies including NSF, DOE, ARO, ONR, NASA, ACS-PRF, the Beckman Foundation, HHMI and FEI.  She is the author of 137 refereed publications and has presented 182 invited lectures.